DocumentCode
1585715
Title
Performance of integrated silicon infrared microspectrometers
Author
Kong, S.-H. ; de Graaf, G. ; Rocha, L.A. ; Wolffenbuttel, R.F.
Author_Institution
Delft University of Technology
Volume
1
fYear
2003
Firstpage
707
Lastpage
710
Keywords
Gratings; Infrared detectors; Optical arrays; Optical device fabrication; Optical devices; Optical refraction; Sensor arrays; Silicon; Spectroscopy; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference, 2003. IMTC '03. Proceedings of the 20th IEEE
ISSN
1091-5281
Print_ISBN
0-7803-7705-2
Type
conf
DOI
10.1109/IMTC.2003.1208248
Filename
1208248
Link To Document