Study on application of MEMS sensor in monitoring the state of vehicle transportation

Based on MEMS silicon micro-machined capacitive sensor, a novel vibration monitoring scheme of vehicle loaded with dangerous goods is presented. With the change of external excitation, the electric capacity of the sensor will change correspondingly, which leads to a feedback voltage change of the movable mass in the sensor. Using this property, by monitoring the feedback voltage magnitude and direction of the movable mass, it can measure the acceleration of the external excitation. And the vibration amplitude of the vehicle can be obtained by integraling the acceleration value twice. The experimental results and theoretical analysis show that the test system has the advantages of simple structure, large measuring range, good stability and linearity, high sensitivity, low test power consumption and can be powered by battery. This test system is especially suitable for those vehicles transiting dangerous goods in power shortage situation