DocumentCode :
1586957
Title :
Diamond based atomic oxygen sensor for space applications
Author :
Haenni, Werner H. ; Boving, Hans J. ; Perret, André M. ; Van Eesbeek, Marc ; Matcham, J.
Author_Institution :
Centre Suisse d´´Electron. et de Microtech. SA, Neuchatel, Switzerland
fYear :
1998
Firstpage :
234
Lastpage :
237
Abstract :
Diamond is a combustible material like graphite and amorphous carbon. Amorphous carbon is currently used as an atomic oxygen sensor material for short space flight missions. Thin, boron doped diamond films, have been used to build sensor devices acting as Wheatstone bridge elements. These devices have been exposed to simulated atomic oxygen. The resistance of the exposed resistors increases linearly with exposure to atomic oxygen. No interruption of the diamond consumption due to “possible” inhibition layer formation has been observed. Such sensor devices are currently fabricated by standard diamond deposition and reactive ion patterning methods
Keywords :
bridge instruments; chemical sensors; diamond; electric sensing devices; elemental semiconductors; space vehicle electronics; sputter etching; C; Wheatstone bridge elements; diamond; exposed resistors; inhibition layer formation; reactive ion patterning methods; sensor devices; space applications; Aerospace materials; Amorphous materials; Atomic layer deposition; Boron; Bridge circuits; Chemical elements; Diamond-like carbon; Organic materials; Space missions; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
High Temperature Electronics Conference, 1998. HITEC. 1998 Fourth International
Conference_Location :
Albuquerque, NM
Print_ISBN :
0-7803-4540-1
Type :
conf
DOI :
10.1109/HITEC.1998.676794
Filename :
676794
Link To Document :
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