Title :
High efficiency optical switches with Heater-on-Slab (HoS) structures
Author :
Song, J.F. ; Fang, Q. ; Liow, T.Y. ; Cai, H. ; Yu, M.B. ; Lo, G.Q. ; Kwong, D.-L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
We propose optical switches in which the heater is fabricated directly on the slab region of the rib waveguide. Two types of Heater-on-Slab (HoS) switches were investigated. In the first type, the silicon slab regions are doped highly to form the heaters. For this type of switches, the switching power is ~85 mW and the switching time is ~27 μs. In the second type, a strip of metal in direct contact with the silicon slab forms the heater. For this type of switches, the switching power is ~25 mW and the switching time is ~17 μs. An extinction ratio of ~28.4 dB was also achieved.
Keywords :
elemental semiconductors; optical switches; optical waveguides; rib waveguides; silicon; HoS structures; Si; heater-on-slab switches; high efficiency optical switches; rib waveguide; silicon slab regions; Heating; Metals; Optical device fabrication; Optical switches; Optical waveguides; Silicon; Slabs;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2011 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4577-0213-6
