Title :
A design and fabrication of mems gyroscope using PZT thin films
Author :
Iga, Yuki ; Kanda, Kensuke ; Fujita, Takayuki ; Higuchi, Kohei ; Maenaka, Kazusuke
Author_Institution :
Maenaka Human-Sensing Fusion Project, JST, Himeji, Japan
Abstract :
In this paper, we describe about design and fabrication of a piezoelectric gyroscope with a trident tuning fork structure for MEMS processes. The PZT thin film on the silicon beam was used for driving source and detection. We obtained the PZT thin film with thickness of 3um by the sputtered. The report describes a design of the gyroscope and characteristics of the PZT thin film.
Keywords :
gyroscopes; microfabrication; microsensors; piezoelectric thin films; MEMS processes; PZT thin film; piezoelectric gyroscope; silicon beam; size 3 mum; Gyroscopes; Monitoring; Silicon; MEMS; PZT; gyroscope;
Conference_Titel :
World Automation Congress (WAC), 2010
Conference_Location :
Kobe
Print_ISBN :
978-1-4244-9673-0
Electronic_ISBN :
2154-4824
