DocumentCode
1588493
Title
Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity
Author
Ray, Prasenjit ; Rao, V. Ramgopal ; Apte, Prakash R.
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
fYear
2010
Firstpage
289
Lastpage
292
Abstract
The work presented here shows a new design for SU8 based piezoresistive accelerometer, where SU8/carbon black is used as piezoresistors. The accelerometer structure is optimized to generate maximum bending stress at the base of the beams. The structure is inherently temperature insensitive. The design of proof mass is such that the sensitivity to cross axis acceleration is kept within a limit of 4%.
Keywords
accelerometers; piezoresistive devices; SU-8 based accelerometer; cross axis sensitivity; optimum design; piezoresistive accelerometer; Acceleration; Accelerometers; Gold; Microelectromechanical devices; Nanoelectronics; Piezoresistance; Piezoresistive devices; Polymers; Stress; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location
Melaka
Print_ISBN
978-1-4244-6608-5
Type
conf
DOI
10.1109/SMELEC.2010.5549364
Filename
5549364
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