Design and analysis of a first-order sigma-delta analog-to-digital converter for MEMS resistive sensor

Author

Ya, Ma Li ; Nordin, Anis Nurashikin ; Khan, Sheroz ; Alam, A. H M Zahirul ; Islam, M. D Rafiqul ; Naji, Ahmed Watiq ; Al-Khateeb, Khalid

Author_Institution

Dept. of Electr. & Comput. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia

fYear

2010

Firstpage

297

Lastpage

300

Abstract

This paper details the design and analysis of a first-order sigma-delta analog-to-digital converter (Σ-Δ ADC) for the MEMS resistive sensors. The working principles of the MEMS resistive sensor and Σ-Δ ADC are outlined first. To verify the functionality of the first-order Σ-Δ modulator, MATLAB© is used to simulate its overall block diagram. Each block is then designed as a CMOS circuit using Cadence Silterra 0.13μm standard COMS process. Finally, the necessary properties (such as quantization error, resolution and signal to noise ratio) of this interface circuit for MEMS resistive sensors are analyzed. It is presented that when connected to MEMS resistive sensors, the usage of Σ-Δ ADC can greatly reduce the quantization error when compared to the conventional Nyquist rate analog to digital converter.

Keywords

CMOS digital integrated circuits; micromechanical devices; sensors; sigma-delta modulation; CMOS circuit; Cadence Silterra standard COMS process; MATLAB; MEMS resistive sensor; conventional Nyquist rate analog to digital converter; first-order Σ-Δ modulator; first-order sigma-delta analog-to-digital converter; interface circuit; quantization error; signal to noise ratio; Analog-digital conversion; CMOS process; Circuit simulation; Computer languages; Delta-sigma modulation; Micromechanical devices; Quantization; Signal analysis; Signal resolution; Signal to noise ratio; Σ-Δ Analog-to-Digital Converter; CMOS; MEMS; Silterra; resistive-sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics (ICSE), 2010 IEEE International Conference on

Conference_Location

Melaka

Print_ISBN

978-1-4244-6608-5

Type

conf

DOI

10.1109/SMELEC.2010.5549366

Filename

5549366