Title :
Low cost prototyping of microfluidic structure
Author :
Alvankarian, Jafar ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microengineering & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
Abstract :
An elastomeric microfluidic structure was developed by polymerization of a liquid photopolymer using UV lithography process. Integration of different components of a microfluidic device including microchannel, micromixer, and microchamber, on one layer and by using one photomask is practiced. More complicated geometries and 2-layer chip was examined in this research and gives promising results. This process enables well control over the thicknesses of the layers, and dimensions of the components considering. The proposed simple process benefits from low cost in development time and expenses of the materials.
Keywords :
elastomers; masks; microfluidics; optical polymers; polymerisation; ultraviolet lithography; UV lithography process; elastomeric microfluidic structure; liquid photopolymer; low cost prototyping; microchamber; microchannel; microfluidic device; micromixer; photomask; polymerization; Coatings; Costs; Fabrication; Geometry; Lamps; Microfluidics; Polymers; Prototypes; Resins; Substrates;
Conference_Titel :
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location :
Melaka
Print_ISBN :
978-1-4244-6608-5
DOI :
10.1109/SMELEC.2010.5549373