DocumentCode
1588670
Title
Low cost prototyping of microfluidic structure
Author
Alvankarian, Jafar ; Majlis, Burhanuddin Yeop
Author_Institution
Inst. of Microengineering & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
fYear
2010
Firstpage
317
Lastpage
320
Abstract
An elastomeric microfluidic structure was developed by polymerization of a liquid photopolymer using UV lithography process. Integration of different components of a microfluidic device including microchannel, micromixer, and microchamber, on one layer and by using one photomask is practiced. More complicated geometries and 2-layer chip was examined in this research and gives promising results. This process enables well control over the thicknesses of the layers, and dimensions of the components considering. The proposed simple process benefits from low cost in development time and expenses of the materials.
Keywords
elastomers; masks; microfluidics; optical polymers; polymerisation; ultraviolet lithography; UV lithography process; elastomeric microfluidic structure; liquid photopolymer; low cost prototyping; microchamber; microchannel; microfluidic device; micromixer; photomask; polymerization; Coatings; Costs; Fabrication; Geometry; Lamps; Microfluidics; Polymers; Prototypes; Resins; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location
Melaka
Print_ISBN
978-1-4244-6608-5
Type
conf
DOI
10.1109/SMELEC.2010.5549373
Filename
5549373
Link To Document