• DocumentCode
    1588670
  • Title

    Low cost prototyping of microfluidic structure

  • Author

    Alvankarian, Jafar ; Majlis, Burhanuddin Yeop

  • Author_Institution
    Inst. of Microengineering & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
  • fYear
    2010
  • Firstpage
    317
  • Lastpage
    320
  • Abstract
    An elastomeric microfluidic structure was developed by polymerization of a liquid photopolymer using UV lithography process. Integration of different components of a microfluidic device including microchannel, micromixer, and microchamber, on one layer and by using one photomask is practiced. More complicated geometries and 2-layer chip was examined in this research and gives promising results. This process enables well control over the thicknesses of the layers, and dimensions of the components considering. The proposed simple process benefits from low cost in development time and expenses of the materials.
  • Keywords
    elastomers; masks; microfluidics; optical polymers; polymerisation; ultraviolet lithography; UV lithography process; elastomeric microfluidic structure; liquid photopolymer; low cost prototyping; microchamber; microchannel; microfluidic device; micromixer; photomask; polymerization; Coatings; Costs; Fabrication; Geometry; Lamps; Microfluidics; Polymers; Prototypes; Resins; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
  • Conference_Location
    Melaka
  • Print_ISBN
    978-1-4244-6608-5
  • Type

    conf

  • DOI
    10.1109/SMELEC.2010.5549373
  • Filename
    5549373