DocumentCode
158892
Title
Effect of TiN coating deposition conditions by vacuum arc plasma on surface roughness and part accuracy
Author
Budilov, V.V. ; Mukhin, V.S. ; Ramazanov, K.N. ; Yagafarov, I.I.
Author_Institution
Ufa State Aviation Tech. Univ., Ufa, Russia
fYear
2014
fDate
Sept. 28 2014-Oct. 3 2014
Firstpage
537
Lastpage
539
Abstract
Titanium nitride (TiN) coatings were deposited by vacuum arc plasma, in an atmosphere of argon and nitrogen using different deposition conditions of part location and configuration, angle between plasma flow and processing surface. The coating thickness, part dimensions and surface roughness were measured before and after coating deposition. The type of part poor shape precision after coating deposition by vacuum arc plasma was defined. An Impact of coating deposition by vacuum arc discharge on the part dimensional and form accuracy was revealed. The effect of parts location on dimensional and radial surfaces form accuracy was induced. The effect of coating surface polythickness on part dimensional and form accuracy for parts with different stiffness was defined. The impact of part location area and parts quantity on coating thickness, surface roughness, dimensional and form accuracy of part was revealed. The coating thickness distribution law, parts quality class and accuracy degree after vacuum ion plasma coating deposition were assigned.
Keywords
coatings; plasma deposition; plasma flow; surface roughness; titanium compounds; TiN; TiN coating deposition condition effect; coating surface polythickness; coating thickness; coating thickness distribution; plasma flow; radial surface; surface roughness; titanium nitride coating deposition; vacuum arc discharge; vacuum arc plasma; vacuum ion plasma coating deposition; Cathodes; Coatings; Plasmas; Rough surfaces; Surface roughness; Surface treatment; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum (ISDEIV), 2014 International Symposium on
Conference_Location
Mumbai
Print_ISBN
978-1-4799-6750-6
Type
conf
DOI
10.1109/DEIV.2014.6961738
Filename
6961738
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