Title :
Optical interface platform for DRAM integration
Author :
Ji, Ho-Chul ; Ha, K.H. ; Joe, I.S. ; Kim, S.G. ; Na, K.W. ; Shin, D.J. ; Suh, S.D. ; Park, Y.D. ; Chung, C.H.
Author_Institution :
Semicond. R&D Center, Samsung Electron., Yongin, South Korea
Abstract :
We present a new bulk-Si optical platform for the optical interfaces toward DRAM integration with localized SOI structure and SPE. The demonstration shows that the waveguide and coupling loss are -0.61dB/mm and -2.6dB, respectively.
Keywords :
DRAM chips; optical elements; silicon; DRAM integration; SOI structure; bulk-silicon optical platform; dynamic random access memory; optical interface platform; silicon-on-insulator; solid-phase epitaxy; Integrated optics; Optical interconnections;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2011 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4577-0213-6
