• DocumentCode
    1588953
  • Title

    Optical interface platform for DRAM integration

  • Author

    Ji, Ho-Chul ; Ha, K.H. ; Joe, I.S. ; Kim, S.G. ; Na, K.W. ; Shin, D.J. ; Suh, S.D. ; Park, Y.D. ; Chung, C.H.

  • Author_Institution
    Semicond. R&D Center, Samsung Electron., Yongin, South Korea
  • fYear
    2011
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We present a new bulk-Si optical platform for the optical interfaces toward DRAM integration with localized SOI structure and SPE. The demonstration shows that the waveguide and coupling loss are -0.61dB/mm and -2.6dB, respectively.
  • Keywords
    DRAM chips; optical elements; silicon; DRAM integration; SOI structure; bulk-silicon optical platform; dynamic random access memory; optical interface platform; silicon-on-insulator; solid-phase epitaxy; Integrated optics; Optical interconnections;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2011 and the National Fiber Optic Engineers Conference
  • Conference_Location
    Los Angeles, CA
  • ISSN
    pending
  • Print_ISBN
    978-1-4577-0213-6
  • Type

    conf

  • Filename
    5875507
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1588953