Title :
Development of Metal Oxide Multilayer Reflectors for Water-Window Wavelengths by Atomic Layer Deposition
Author :
Matsuyama, Hiroki ; Kumagai, Hayato ; Iimura, Y. ; Midorikawa, Katsumi ; Obara, M.
Author_Institution :
RIKEN
Keywords :
Atomic layer deposition; Nonhomogeneous media;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719347
