DocumentCode :
1589883
Title :
Development of nanocrystalline laser ablated thick film array gas sensor
Author :
Abadi, M. H Shahrokh ; Hamidon, M.N. ; Shaari, Abdul Halim ; Abdullah, Norhafizah ; Wagiran, Rahman ; Misron, Norhisam
Author_Institution :
Electr. & Electron. Dept., Univ. Putra Malaysia, Serdang, Malaysia
fYear :
2010
Firstpage :
88
Lastpage :
91
Abstract :
A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer.
Keywords :
gas sensors; nanofabrication; nanoparticles; platinum; pulsed laser deposition; sensor arrays; thick film sensors; tin compounds; Al2O3; PLAD technique; Pt; SnO2; alumina substrate; microstructural properties; morphological properties; nanocrystalline laser ablated gas sensor; pellet; platinum nanopowder; pulse laser ablation deposition; sensitive layer deposition; thick film array gas sensor; tin dioxide; wood smoke; Electrodes; Gas detectors; Gas insulation; Gas lasers; Optical arrays; Pulsed laser deposition; Sensor arrays; Thermal sensors; Thick film sensors; Thick films; Array gas sensor; Laser ablation; SnO2; Thick film;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location :
Melaka
Print_ISBN :
978-1-4244-6608-5
Type :
conf
DOI :
10.1109/SMELEC.2010.5549421
Filename :
5549421
Link To Document :
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