A quartz galvanometer for optical scanning in a laser printer application

Author

Sugiyama, N. ; Yamazaki, D. ; Ueda, T.

Author_Institution

Yokogawa Electr. Corp., Tokyo, Japan

fYear

1991

Firstpage

734

Lastpage

737

Abstract

Using quartz micromachining, a compact galvanometer for optical scanning in a laser printer (LP) is developed. The merits of the device are compact size (24 mm * 24 mm * 14 mm), large scan angle (a 70 degrees C peak-to-peak effective optical angle), high speed scanning (a speed of 840 scans per second), and a structure suitable for mass production. The features of the galvanometer were evaluated and it was found that the jitter is less than 0.03%, the wobble is less than 90 mu rad, and the stability of the scan angle over a temperature range of 5 to 50 degrees C was less than a 0.5% change. These values satisfy the specifications of optical scanning in a LP.<>

Keywords

crystal resonators; electric sensing devices; etching; galvanometers; high-speed optical techniques; laser printers; micromechanical devices; optical systems; photolithography; 5 to 50 C; SiO/sub 2/; compact size; etching; high speed scanning; jitter; large scan angle; laser printer; mass production; optical galvanometer; optical scanning; photolithography; quartz galvanometer; quartz micromachining; stability; wobble; Anisotropic magnetoresistance; Etching; High speed optical techniques; Jitter; Laser applications; Mirrors; Optical devices; Optical resonators; Optical sensors; Printers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148987

Filename

148987