Title :
On-wafer characterization de-embedding and transmission line optimization on silicon for millimeter-wave applications
Author :
Rockwell, Stephen K. ; Bosco, Bruce A.
Author_Institution :
Motorola Labs., Tempe, AZ, USA
Abstract :
The design and implementation of transmission line based calibration standards, suitable for de-embedding on-wafer active and passive elements for millimeter-wave applications on silicon BiCMOS backend process technology, is investigated. Loss mechanisms, accuracy requirements, layout considerations, and impedance dependent characteristics of transmission line structures are discussed. The application of popular on-wafer, in situ calibration de-embedding approaches is evaluated. Methods to improve backend process technology for millimeter-wave applications are suggested, based upon transmission modeling using EM simulation tools. Modeled versus measured results are presented in support of conclusions.
Keywords :
BiCMOS integrated circuits; MIMIC; calibration; circuit optimisation; coplanar waveguides; integrated circuit measurement; integrated circuit modelling; microstrip lines; BiCMOS backend process technology; Si; coplanar waveguides; impedance dependent characteristics; microstrip transmission lines; millimeter-wave IC; on-wafer characterization; on-wafer de-embedding; transmission line based calibration standards; transmission line optimization; transmission modeling; CMOS technology; Calibration; Distributed parameter circuits; Impedance; Integrated circuit interconnections; Millimeter wave measurements; Millimeter wave radar; Millimeter wave technology; Silicon; Transmission lines;
Conference_Titel :
Radio Frequency integrated Circuits (RFIC) Symposium, 2005. Digest of Papers. 2005 IEEE
Print_ISBN :
0-7803-8983-2
DOI :
10.1109/RFIC.2005.1489875
