Ultimate Precision in Micromachining Due to Extreme Energy Containment by Laser Pulses Down to 5 fs

Author

Kautek, W. ; Kruger, Jorg ; Lenzner, Matthias ; Sartania, S. ; Spielmann, C. ; Krausz, F.

Author_Institution

Federal Institute for Materials Research and Testing

fYear

1998

Firstpage

257

Lastpage

257

Keywords

Micromachining; Optical pulses;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

DOI

10.1109/CLEOE.1998.719354

Filename

719354

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