Title :
Chemical sensors fabricated in CMOS-MEMS technology
Author :
Voiculescu, Ioana
Author_Institution :
Mech. Eng. Dept., City Coll. of New York, New York, NY, USA
Abstract :
This presentation is an overview of standard Integrated Circuits technology that enables the integration of the chemical sensors with the necessary driving and signal conditioning circuitry on the same chip. A variety of Complementary Metal Oxide Semiconductor (CMOS)-based chemical sensors found in the literature and the microprocessing technologic steps necessary for the integration of microelectromechanical systems (MEMS) sensors in CMOS technology are explained in this presentation.
Keywords :
CMOS integrated circuits; chemical sensors; driver circuits; microfabrication; microsensors; signal processing equipment; CMOS-MEMS technology; chemical sensor fabrication; complementary metal oxide semiconductor; driver circuit; microelectromechanical sensor; signal conditioning circuitry; standard integrated circuit technology; CMOS process; CMOS technology; Chemical sensors; Chemical technology; Costs; Integrated circuit technology; Intelligent sensors; Micromachining; Micromechanical devices; Packaging;
Conference_Titel :
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Conference_Location :
Melaka
Print_ISBN :
978-1-4244-6608-5
DOI :
10.1109/SMELEC.2010.5549499
