Quick preparation of thin films and nanosize powders by high-density ablation plasma produced by intense pulsed ion beam

Using high-density ablation plasma produced by the intense pulsed ion beam interaction with solid targets, we have successfully prepared various kinds of thin films or ultraframe nanosize powders by rapid cooling, which was named pulsed ion beam evaporation (IBE). Very quick and stoichiometric preparation is available by the ablation plasma (density /spl sim/10/sup 19/ cm/sup -3/) in vacuum, without heating substrate or without post-annealing. Since we have reported the preparation of thin films of ZnS in 1988, we only discuss the preparation of crystallized B/sub 4/C films, because we believe this is the first demonstration in the world. As known, B/sub 4/C is very hard after diamond, wear resistant, and stable at high temperature. The experiment was done by an intense pulsed power machine, "ETIGO-II". Using various diagnostics by XRD, FT-IR, FE-SEM, TEM, EELS, and Vickers hardness, we have confirmed the preparation of the crystallized B/sub 4/C films. Absorptions associated with B-C bond have been clearly observed. The maximum Vickers harness was achieved to 2,300.