DocumentCode
159256
Title
Differential Si ring-resonator biosensors robust to process variations
Author
Taniguchi, Takafumi ; Amemiya, Yoshiteru ; Ikeda, Takashi ; Kuroda, Akihiro ; Yokoyama, Shiyoshi
Author_Institution
Res. Inst. for Nanodevice & Bio Syst., Hiroshima Univ., Higashi-Hiroshima, Japan
fYear
2014
fDate
27-29 Aug. 2014
Firstpage
213
Lastpage
214
Abstract
Differential Si ring optical resonator sensors have been fabricated. Detection sensitivity was 10-2% for sucrose solution. This corresponds to 1.05×10-9 g/ml for prostate specific antigen and is almost in the level of practical use.
Keywords
biosensors; chemical sensors; elemental semiconductors; integrated optics; optical fabrication; optical resonators; optical sensors; silicon; Si; detection sensitivity; differential Si ring-resonator biosensors; process variations; prostate specific antigen; sucrose solution; Biosensors; Scattering; Sensitivity; Silicon; Sugar; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location
Paris
Print_ISBN
978-1-4799-2282-6
Type
conf
DOI
10.1109/Group4.2014.6961930
Filename
6961930
Link To Document