Title :
Differential Si ring-resonator biosensors robust to process variations
Author :
Taniguchi, Takafumi ; Amemiya, Yoshiteru ; Ikeda, Takashi ; Kuroda, Akihiro ; Yokoyama, Shiyoshi
Author_Institution :
Res. Inst. for Nanodevice & Bio Syst., Hiroshima Univ., Higashi-Hiroshima, Japan
Abstract :
Differential Si ring optical resonator sensors have been fabricated. Detection sensitivity was 10-2% for sucrose solution. This corresponds to 1.05×10-9 g/ml for prostate specific antigen and is almost in the level of practical use.
Keywords :
biosensors; chemical sensors; elemental semiconductors; integrated optics; optical fabrication; optical resonators; optical sensors; silicon; Si; detection sensitivity; differential Si ring-resonator biosensors; process variations; prostate specific antigen; sucrose solution; Biosensors; Scattering; Sensitivity; Silicon; Sugar; Temperature sensors;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6961930
