Title :
High quality SiGe waveguide platform for Ge photonics on bulk silicon substrates
Author :
Chaisakul, Papichaya ; Marris-Morini, D. ; Frigerio, Jacopo ; Chrastina, D. ; Rouifed, Mohamed Said ; Cecchi, S. ; Isella, Giovanni ; Vivien, L.
Author_Institution :
Inst. d´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France
Abstract :
We show that Ge-rich Si1-xGex virtual substrates can act as passive, high-quality optical waveguides on which low-temperature, epitaxial growth of Ge quantum well devices can be realized. A proof-of-concept, low-voltage, broadband optical interconnect is presented.
Keywords :
epitaxial growth; germanium; integrated optics; integrated optoelectronics; optical interconnections; optical materials; optical waveguides; quantum well devices; silicon compounds; Ge photonics; Ge quantum well devices; Ge-SiGe; Ge-rich Si1-xGex virtual substrates; broadband optical interconnect; bulk silicon substrates; epitaxial growth; high quality SiGe waveguide platform; high-quality optical waveguides; low-temperature optical waveguides; low-voltage optical interconnect; passive optical waveguides; Optical device fabrication; Optical interconnections; Optical modulation; Optical waveguides; Quantum well devices; Silicon germanium; Ge/SiGe multiple quantum wells; Optical interconnects; SiGe waveguide;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6961950
