High quality SiGe waveguide platform for Ge photonics on bulk silicon substrates

Author

Chaisakul, Papichaya ; Marris-Morini, D. ; Frigerio, Jacopo ; Chrastina, D. ; Rouifed, Mohamed Said ; Cecchi, S. ; Isella, Giovanni ; Vivien, L.

Author_Institution

Inst. d´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France

fYear

2014

fDate

27-29 Aug. 2014

Firstpage

108

Lastpage

109

Abstract

We show that Ge-rich Si_1-xGe_x virtual substrates can act as passive, high-quality optical waveguides on which low-temperature, epitaxial growth of Ge quantum well devices can be realized. A proof-of-concept, low-voltage, broadband optical interconnect is presented.

Keywords

epitaxial growth; germanium; integrated optics; integrated optoelectronics; optical interconnections; optical materials; optical waveguides; quantum well devices; silicon compounds; Ge photonics; Ge quantum well devices; Ge-SiGe; Ge-rich Si_1-xGe_x virtual substrates; broadband optical interconnect; bulk silicon substrates; epitaxial growth; high quality SiGe waveguide platform; high-quality optical waveguides; low-temperature optical waveguides; low-voltage optical interconnect; passive optical waveguides; Optical device fabrication; Optical interconnections; Optical modulation; Optical waveguides; Quantum well devices; Silicon germanium; Ge/SiGe multiple quantum wells; Optical interconnects; SiGe waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics (GFP), 2014 IEEE 11th International Conference on

Conference_Location

Paris

Print_ISBN

978-1-4799-2282-6

Type

conf

DOI

10.1109/Group4.2014.6961950

Filename

6961950