Calibration of the spring constants of various AFM cantilevers with the small uncertainty level of 2%

Author

Kim, Min-Seok ; Choi, Jae-Hyuk ; Park, Yon-Kyu

Author_Institution

Div. of Phys. Metrol., KRISS, Daejeon

fYear

2006

Firstpage

2532

Lastpage

2537

Abstract

Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanics for quantified force metrology at pico- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 Nm^-1) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01~100 Nm^-1 with uncertainties of about 2%

Keywords

atomic force microscopy; calibration; cantilevers; AFM; NFC; atomic force microscopy; biomechanics; calibration; microcantilevers; nanoNewton level; nanoforce calibrator; nanomechanics; picoNewton level; quantified force metrology; spring constants; Atomic force microscopy; Atomic measurements; Calibration; Force measurement; ISO standards; Mechanical variables measurement; Metrology; Springs; Stress measurement; Uncertainty; atomic force microscopy; balance; calibration; cantilever; spring constant;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE-ICASE, 2006. International Joint Conference

Conference_Location

Busan

Print_ISBN

89-950038-4-7

Electronic_ISBN

89-950038-5-5

Type

conf

DOI

10.1109/SICE.2006.314740

Filename

4108069