DocumentCode
159331
Title
Fabrication tolerant silicon MZI filter
Author
Dwivedi, Shipra ; D´heer, Herbert ; Bogaerts, W.
Author_Institution
IMEC, Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
fYear
2014
fDate
27-29 Aug. 2014
Firstpage
147
Lastpage
148
Abstract
A compact fabrication tolerant MZI filter is demonstrated. The measured device shows a 20-fold improved tolerance to systematic waveguide linewidth variations, with a wavelength shift of less than 60 pm/nm linewidth change.
Keywords
Mach-Zehnder interferometers; optical fabrication; optical waveguide filters; silicon; compact fabrication tolerant silicon MZI filter; improved tolerance; linewidth change; systematic waveguide linewidth variation; wavelength shift; Active filters; Fabrication; Optical waveguides; Sensitivity; Silicon; Waveguide transitions; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location
Paris
Print_ISBN
978-1-4799-2282-6
Type
conf
DOI
10.1109/Group4.2014.6961969
Filename
6961969
Link To Document