Title :
Silicon photonic devices and their integration technology
Author :
Yamada, Koji ; Tsuchizawa, Tai ; Watanabe, Toshifumi ; Fukuda, Hiroshi ; Shinojima, Hiroyuki ; Nishi, Hidetaka ; Park, Sungbong ; Kou, Rai ; Ishikawa, Yasuhiko ; Wada, Kazumi ; Itabashi, Sei-ichi
Author_Institution :
Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
Various photonic devices covering passive to active functions have been developed and monolithically-integrated on a silicon wire waveguide platform. Obstacles to practical applications are being eliminated by applying state-of-art fabrication technologies and unique device designs.
Keywords :
elemental semiconductors; integrated optics; silicon; Si; active functions; integration technology; monolithic integration; passive functions; silicon photonic devices; silicon wire waveguide platform; Optical attenuators; Optical imaging; Optical polarization; Optical waveguides; Passive optical networks; Photonics; Silicon;
Conference_Titel :
Optical Fiber Communication Conference and Exposition (OFC/NFOEC), 2011 and the National Fiber Optic Engineers Conference
Conference_Location :
Los Angeles, CA
Print_ISBN :
978-1-4577-0213-6
