Microcavity plasma devices operating in air: Optimization of the device structure for efficient nitric oxide generation

Summary form only given. This presentation describes the fabrication and operation of microdischarge devices which can sustain stable air plasma inside the microcavity and efficiently produce desired gas species from a gas flow. A DC-discharge type microcavity device has been fabricated on nanoporous Al₂O₃ dielectrics, a robust dielectric produced by wet chemical processing.Production of nitric oxide (NO) from air discharge is one of key interests in this presentation with a potential application of biomedical therapeutics. By controlling the microdischarge device characteristics designed to have optimized condition for NO generation, it can produce NO species selectively at voltages, at least a order lower compared to other conventional techniques. Quantitative measurement of gas species out of the air microplasmas will be discussed.