DocumentCode
1596488
Title
In-situ control of quantum point contacts using scanning probe microscopy scratch lithography
Author
Suda, Ryutaro ; Ohyama, Takahiro ; Tseng, Ampere A. ; Shirakashi, Jun-ichi
Author_Institution
Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
fYear
2012
Firstpage
1
Lastpage
5
Abstract
Quantum point contacts (QPCs) are formed by mechanically scratching Au channels with a scanning probe microscope (SPM) in ambient condition. A variation of electrical properties of the Au channels was caused by a direct modification of the channels using SPM scratching and was in-situ controlled by monitoring the conductance across the scratched region. Such in-situ measurements provide a more accurate method of controlling device properties than by controlling geometric dimensions alone. Scratch experiments were carried out using a diamond-coated tip in ambient air. The conductance of the Au channels was slowly decreased with the increase of process time as the channel was constricted by the scratching. The conductance changed in quantized steps of the conductance quantum, G0= 2e2/h, at the moment of breaking of the Au channels. Furthermore, the control time to adjust the conductance from 12 G0 to 0 G0 was successfully increased from 4 to 32 sec when the scan speed of the SPM tip was decreased from 100 to 20 pm/s. It is suggested that atomic-size contact is successfully formed by SPM scratching. These results imply that SPM scratch nanolithography is promising for the fabrication of nanoscale devices consisting of QPCs.
Keywords
nanolithography; quantum point contacts; scanning probe microscopy; Au channels; SPM scratch nanolithography; SPM scratching; ambient condition; device properties; diamond-coated tip; electrical properties; geometric dimensions; in-situ control; mechanical scratching; nanoscale devices; quantum point contacts; scanning probe microscope; scanning probe microscopy scratch lithography; scratched region; Atomic force microscopy; Fabrication; Force; Gold; Lithography; Resistance; Conductance quantization; In-situ measurement; Quantum point contact; Scanning probe microscopy; scratch;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location
Birmingham
ISSN
1944-9399
Print_ISBN
978-1-4673-2198-3
Type
conf
DOI
10.1109/NANO.2012.6321908
Filename
6321908
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