Title :
Linear electronic scanning-type ultrasonic imaging method using comb electrodes
Author :
Sawaguchi, A. ; Toda, K.
Author_Institution :
Dept. of Electron. Eng., Nat. Defense Acad., Yokosuka, Japan
Abstract :
A linear electronic scanning-type ultrasonic imaging technique which uses comb electrode arrays is described. A comb arrangement of electrodes is mounted on one surface of a thin piezoelectric ceramic plate by a photolithography technique. The structure makes the development of the scanning resolution easier in comparison with the use of conventional array transducer elements. The region between the comb electrode and the counter electrode operates as an equivalent thickness-mode vibrator. A longitudinal wave is effectively radiated into water via an acoustical lens. The point focusing of the sound beam is realized because of the agreement of two orthogonal focal positions. Ultrasonic imaging results for several samples obtained using the transducer are shown.<>
Keywords :
acoustic imaging; electrodes; focusing; photolithography; piezoelectric transducers; ultrasonic applications; ultrasonic transducers; H/sup 2/O; HDT; acoustical lens; comb electrode; comb electrodes; counter electrode; equivalent thickness-mode vibrator; linear electronic scanning-type ultrasonic imaging; longitudinal wave; photolithography; point focusing; scanning resolution; sound beam; thin piezoelectric ceramic plate; Acoustic transducers; Ceramics; Counting circuits; Electrodes; Lenses; Lithography; Piezoelectric transducers; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149018
