A low-voltage electrostatically actuated MEMS scanner for in vivo biomedical imaging

Author

Yeow, T.W. ; Lim, K.Y. ; Wilson, B. ; Goldenberg, A.A.

Author_Institution

Robotics & Autom. Lab., Toronto Univ., Ont., Canada

fYear

2002

fDate

6/24/1905 12:00:00 AM

Firstpage

205

Lastpage

207

Abstract

With the inherent advantages of micromachining technologies such as small size, small mass, low cost, low power consumption and high reliability, there will be radical changes to biomedical devices and how clinical diagnoses are made. One of the most promising applications of microtechnologies is in the biomedical field. This paper presents a low-voltage high-torque MEMS 2D scanner well suited for in vivo biomedical imaging

Keywords

bio-optics; biocontrol; biomedical equipment; biomedical imaging; electrostatic actuators; micro-optics; micromachining; mirrors; optical control; optical microscopes; optical scanners; sputter etching; MEMS 2D scanner; deep reactive ion etching; electrostatically actuated scanner; endoscopic coherent optical microscope; in vivo biomedical imaging; in vivo tissue imaging; low-voltage high-torque scanner; micromachining; micromechatronics; optical MEMS scanner; Biomedical imaging; Biomedical optical imaging; Electrostatics; Etching; In vivo; Micromechanical devices; Mirrors; Resists; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine & Biology 2nd Annual International IEEE-EMB Special Topic Conference on

Conference_Location

Madison, WI

Print_ISBN

0-7803-7480-0

Type

conf

DOI

10.1109/MMB.2002.1002314

Filename

1002314