Title :
Variable Forgetting Factor-Based Friction Compensation Method of Precision Stages
Author :
Goka, Shigeki ; Hashimoto, Seiji ; Ohishi, Kiyoshi ; Ishikawa, Takeo ; Adachi, Shuichi ; Kosaka, Koji ; Kubota, Hiroshi ; Ohmi, Tadahiro
Author_Institution :
Dept. of Electron. Eng., Gunma Univ.
Abstract :
This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments
Keywords :
compensation; friction; parameter estimation; piezoelectric actuators; position control; ultrasonic motors; SPIDER; VFF; actuator; adaptive parameter identification; friction compensation method; frictional drive mechanism; nonresonant ultrasonic motor; precision positioning stage control; synchronous piezoelectric device driver; variable forgetting factor; Actuators; Computer industry; Electric variables control; Electronics industry; Friction; Industrial control; Industrial electronics; Leg; Physics computing; Position measurement; adaptive identification; friction compensation; ultra-precision stage; variable forgetting factor;
Conference_Titel :
SICE-ICASE, 2006. International Joint Conference
Conference_Location :
Busan
Print_ISBN :
89-950038-4-7
Electronic_ISBN :
89-950038-5-5
DOI :
10.1109/SICE.2006.315007
