Title :
Characterization of thin films by neural networks and analytical approximations
Author :
Castellano-Hernandez, E. ; Sacha, G.M.
Author_Institution :
Dept. de Ing. Inf., Univ. Autonoma de Madrid, Madrid, Spain
Abstract :
In this work we focus on the characterization of thin films by Electrostatic Force Microscopy (EFM). We use the estimations made by Artificial Neural Networks (ANNs) trained by numerical results from the Generalized Image Charge Method (GICM). The ANN outputs suggest that an effective dielectric constant can be defined for any thin film sample. The definition of an effective dielectric constant allows us to include complex thin film samples in analytical approximations previously developed for much simpler surfaces. From the new analytical formulation we can conclude that the dielectric thin films interact in a complex way. Moreover, the metallic plate below the surface changes the effective dielectric constant, suggesting that its contribution cannot be isolated from the one of the dielectric plates.
Keywords :
approximation theory; dielectric thin films; learning (artificial intelligence); neural nets; permittivity; physics computing; analytical approximations; analytical formulation; artificial neural network outputs; complex thin film; dielectric plates; dielectric thin films; effective dielectric constant definition; electrostatic force microscopy; generalized image charge method; metallic plate; surface changes; thin film characterization; Artificial neural networks; Dielectric constant; Films; Substrates; Electrostatic Force Microscopy; Thin Films;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6321943