MEMS actuator array as a neuro-physiological testing tool

Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4×5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal microactuators along with actuation results are also presented