DocumentCode :
1598134
Title :
High-density and sub-20-nm GaAs nanodisk array fabricated using neutral beam etching process for high performance QDs devices
Author :
Tamura, Yosuke ; Igarashi, Makoto ; Fauzi, Mohd Erman ; Tsukamoto, Rikako ; Kaizu, Toshiyuki ; Kiba, Takayuki ; Yamashita, Ichiro ; Okada, Yoshitaka ; Murayama, Akihiro ; Samukawa, Seiji
Author_Institution :
Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan
fYear :
2012
Firstpage :
1
Lastpage :
4
Abstract :
III-V compound quantum dots are extremely attractive in researching the quantum effect and developing future quantum photovoltaic devices. We developed a defect-free fabrication process for sub-20-nm gallium arsenide (GaAs) nanodisk using bio-template and neutral beam etching. We successfully fabricated defect-free and high-aspect ratio GaAs/aluminium gallium arsenide (AlGaAs) stack-layered sub-20-nm nanodisk structures. The diameter of the GaAs nanodisk could be precisely controlled from 12 to 18 nm by a combination of Hydrogen-radical treatment and neutral beam etching. We then detected a strong photoluminescence peak originating from the GaAs nanodisk for the first time even when using top-down processes. We found that our fabricated nanodisk array structures have great potential for high performance III-V compound optical quantum dots devices.
Keywords :
etching; gallium arsenide; photoelectric devices; photoluminescence; semiconductor quantum dots; GaAs; III-V compound optical quantum dots devices; high performance QD devices; hydrogen-radical treatment; nanodisk array; nanodisk structures; neutral beam etching process; photoluminescence peak; quantum photovoltaic devices; Etching; Gallium arsenide; Iron; Measurement by laser beam; Nanoscale devices; Photonics; Process control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
ISSN :
1944-9399
Print_ISBN :
978-1-4673-2198-3
Type :
conf
DOI :
10.1109/NANO.2012.6321974
Filename :
6321974
Link To Document :
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