Title :
A new method of increasing numerical aperture of microlens for biophotonic MEMS
Author :
Jeong, Ki-Hun ; Lee, Luke P.
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
fDate :
6/24/1905 12:00:00 AM
Abstract :
A novel method for increasing numerical aperture of microlens for biophotonic applications is presented in this paper. It is based on the control of UV curable polymer lenslet volume and surface energy of substrates. The volume control of polymer lenslets for tuning the focal length is accomplished on the substrates with different surface energies by a microdispensing method. Microlens with high numerical aperture is fabricated on the control layer of a hydrophobic polymer deposited on the cover substrate of a microfluidic chip. Microlenses with different numerical apertures have been designed and characterized. The high numerical aperture microlens integrated on a microfluidic chip will allow high-resolution and high signal to noise detection in biophotonic MEMS applications
Keywords :
biological techniques; microfluidics; microlenses; optical fabrication; optical polymers; ray tracing; surface energy; PDMS slabs; UV curable polymer lenslet; biophotonic MEMS; focal length control; high signal to noise detection; hydrophobic polymer; micro-chip level biophotonics; microdispensing method; microfluidic chip; microlens; numerical aperture increase; polymer lenslet volume control; ray trace; spherical lens shape; surface energy control; Apertures; Biophotonics; Fabrication; Fluidics; Lenses; Microfluidics; Micromechanical devices; Microoptics; Optical noise; Polymers;
Conference_Titel :
Microtechnologies in Medicine & Biology 2nd Annual International IEEE-EMB Special Topic Conference on
Conference_Location :
Madison, WI
Print_ISBN :
0-7803-7480-0
DOI :
10.1109/MMB.2002.1002350
