A new method of increasing numerical aperture of microlens for biophotonic MEMS

Author

Jeong, Ki-Hun ; Lee, Luke P.

Author_Institution

Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA

fYear

2002

fDate

6/24/1905 12:00:00 AM

Firstpage

380

Lastpage

383

Abstract

A novel method for increasing numerical aperture of microlens for biophotonic applications is presented in this paper. It is based on the control of UV curable polymer lenslet volume and surface energy of substrates. The volume control of polymer lenslets for tuning the focal length is accomplished on the substrates with different surface energies by a microdispensing method. Microlens with high numerical aperture is fabricated on the control layer of a hydrophobic polymer deposited on the cover substrate of a microfluidic chip. Microlenses with different numerical apertures have been designed and characterized. The high numerical aperture microlens integrated on a microfluidic chip will allow high-resolution and high signal to noise detection in biophotonic MEMS applications

Keywords

biological techniques; microfluidics; microlenses; optical fabrication; optical polymers; ray tracing; surface energy; PDMS slabs; UV curable polymer lenslet; biophotonic MEMS; focal length control; high signal to noise detection; hydrophobic polymer; micro-chip level biophotonics; microdispensing method; microfluidic chip; microlens; numerical aperture increase; polymer lenslet volume control; ray trace; spherical lens shape; surface energy control; Apertures; Biophotonics; Fabrication; Fluidics; Lenses; Microfluidics; Micromechanical devices; Microoptics; Optical noise; Polymers;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine & Biology 2nd Annual International IEEE-EMB Special Topic Conference on

Conference_Location

Madison, WI

Print_ISBN

0-7803-7480-0

Type

conf

DOI

10.1109/MMB.2002.1002350

Filename

1002350