DocumentCode :
1598496
Title :
Local control of ZnO nanorods growing on microstructures with an external electric-field assistance
Author :
Zong, Xianli ; Zhu, Rong ; Li, Dezhao
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
fYear :
2012
Firstpage :
1
Lastpage :
5
Abstract :
Local control of Zinc Oxide (ZnO) nanorods growing onto microstructures through a solution rout under an external electric-field assistance was demonstrated. The nanorods were grown on predefined electrodes patterned by photolithography. Through applying a DC or AC electric field onto the microfabricated top electrode-pair, the site-selective growth of ZnO nanorods was realized while a DC voltage is applied onto the bottom electrode. Under a proper direct current field, ZnO nanorods only grow on the top cathode electrode. Nevertheless, ZnO nanorods under an alternating current electric field at megahertz grow on and between the top electrode-pair. This control method provides a promising approach for integrating ZnO nanorods into micro/nanoelectromechanical devices.
Keywords :
II-VI semiconductors; liquid phase deposition; nanofabrication; nanolithography; nanopatterning; nanorods; photolithography; semiconductor growth; wide band gap semiconductors; zinc compounds; DC voltage; ZnO; alternating current electric field; bottom electrode; control method; direct current electric field; external electric-field; local control; microelectromechanical device; microfabricated top electrode-pair; microstructures; nanoelectromechanical device; photolithography; site-selective growth; solution route; top cathode electrode; zinc oxide nanorods; Gold; Lithography; Logic gates; Sputtering; Zinc;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
ISSN :
1944-9399
Print_ISBN :
978-1-4673-2198-3
Type :
conf
DOI :
10.1109/NANO.2012.6321987
Filename :
6321987
Link To Document :
بازگشت