Morphological characterization of sub-micron PDMS bowl structures

In this study, both SEM stereoscopic technique and FIB milling method are used to characterize the morphology of PDMS bowl-shaped structure. The presented structure is created via a low-cost and high-throughput modified colloidal lithographic method. 3D reconstruction through SEM stereoscopic images is used to perform volume analysis while FIB milling is used to perform cross-sectional analysis. The results show that the average value of maximum peak to valley distance is 516 nm and the average height of the pyramids is around 325 nm. This approach provides a simple and efficient way to measure the morphological parameters in nanometer-sized structures.