Parallel beam micro sensor/actuator unit using PZT thin films and its application examples

Piezoelectric materials are used for sensors and actuators. It is difficult to form complicated structures with piezoelectric materials, so the actuators and sensors are simple. Using the hydrothermal method, we can fabricate PZT thin film on a three dimensional titanium substrate. We use this feature for actuators and sensors, and made a new sensor/actuator unit using this method on a parallel beam structure. We propose application examples to a two degrees of freedom actuator, G-sensor, and vibration gyroscope