• DocumentCode
    1599092
  • Title

    Fabrication and characterization of carbon nanotubes as r.f. interconnects

  • Author

    Hao, L. ; Cox, D. ; Lees, K. ; Gallop, J.C. ; See, P. ; Clarke, R. ; Janssen, T.J.B.M. ; Zhang, R.F. ; Wei, F.

  • Author_Institution
    Nat. Phys. Lab., Teddington, UK
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    In this paper we describe the design and implementation of a coplanar waveguide structure (CPW) and its use as a basis for characterizing the properties of a number of different types of carbon nanotubes. We report on the issues involved in integrating nanotubes with conventional scale photolithograpically patterned substrates and we model the measured response of the resulting circuits to de-embed the CNT properties.
  • Keywords
    carbon nanotubes; coplanar waveguides; CNT; CPW; carbon nanotubes; coplanar waveguide structure; photolithograpically patterned substrate; r.f. interconnects; Electrodes; Gold; Imaging; Integrated circuit interconnections; Laboratories; Nitrogen; Semiconductor device measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
  • Conference_Location
    Birmingham
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4673-2198-3
  • Type

    conf

  • DOI
    10.1109/NANO.2012.6322012
  • Filename
    6322012
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1599092