DocumentCode
1599197
Title
Conductive AFM of transfer printed nano devices
Author
Weiler, Benedikt ; Bareiss, Mario ; Kälblein, Daniel ; Zschieschang, Ute ; Klauk, Hagen ; Scarpa, Giuseppe ; Fabel, Bernhard ; Porod, Wolfgang ; Lugli, Paolo
Author_Institution
Inst. for Nanoelectron., Tech. Univ. Munchen, Munich, Germany
fYear
2012
Firstpage
1
Lastpage
5
Abstract
Nano diodes show great potential for applications in detectors, communications and energy harvesting. However, to make them suitable for low-cost mass production, these nano devices have to be fabricated reliably over large areas while minimizing process time and costs. Printing techniques are promising candidates to overcome these economical drawbacks of conventional nanolithography without a significant loss in structure quality. In this work, we focus on nano transfer printing (nTP) to fabricate nm-scale diodes over extensive areas. Using a temperature-enhanced process, several millions of diodes were transfer-printed in one single step. We show the reliable transfer of functioning Schottky and MIM diodes of different sizes, which demonstrates the versatility and usability of our approach (nTP), paving the way to numerous applications in the fields of e.g. infrared detection or energy harvesting. The nano devices are characterized electrically by conductive Atomic Force Microscopy (c-AFM) measurements. For these MIM structures, quantum-mechanical tunneling was determined to be the main conduction mechanism across the metal-oxide-metal junction.
Keywords
MIM devices; Schottky diodes; atomic force microscopy; nanolithography; nanostructured materials; MIM diode; MIM structure; Schottky diode; c-AFM measurement; conductive AFM; conductive atomic force microscopy; energy harvesting; infrared detection; low-cost mass production; metal-oxide-metal junction; nTP; nanodiode; nanolithography; nanotransfer printing; nm-scale diode fabrication; printing technique; quantum-mechanical tunneling; temperature-enhanced process; transfer printed nanodevice; Atomic force microscopy; Bridges; Force; Indexes; Reliability; Waste heat; conductive AFM; metal-oxide-metal diodes; nano transfer printing; ordered nanostructures;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location
Birmingham
ISSN
1944-9399
Print_ISBN
978-1-4673-2198-3
Type
conf
DOI
10.1109/NANO.2012.6322016
Filename
6322016
Link To Document