Title :
A rigid ring electrostatic harmonic wobble motor with axial field
Author :
Paratte, L. ; Racine, G.-A. ; de Rooij, N.F. ; Bornand, E.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
The working principle of a novel wobble electrostatic micromotor and the fabrication of a prototype are presented. Surface micromachining of LPCVD (low-pressure chemical vapor deposited) polysilicon layers and sacrificial dioxide layer technology are used. For the prototype, a very high harmonic reduction of 1:20000 can be obtained through the vertical wobbling motion of a 200- mu m-diameter ring. Due to the planar technology aspect ratio, the electrostatic top drive of the wobbling ring used allows a much higher motor torque as in the case of direct drives or even harmonic side drives. Flexible elements permit the connection from the wobbling ring to a purely rotating hub.<>
Keywords :
electric motors; electrostatic devices; integrated circuit technology; micromechanical devices; semiconductor technology; small electric machines; 200 micron; Si-SiO/sub 2/; axial field; electrostatic top drive; fabrication; gimbals suspended prototype; harmonic reduction; low pressure CVD; planar technology; polysilicon layers; rigid ring electrostatic harmonic wobble motor; sacrificial SiO/sub 2/ layers; surface micromachining; vertical wobbling motion; wobbling ring; Clamps; Electrostatics; Fabrication; Friction; Prototypes; Rotors; Stators; Torque; Virtual colonoscopy; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149029
