Title :
Assembly and evaluation of MWCNTs probe thermal sensor by nanorobotic manipulation
Author :
Yang, Zhan ; Nakajima, Masahiro ; Shen, Yajing ; Fukuda, Toshio
Author_Institution :
Dept. of Micro-nano Syst. Eng., Nagoya Univ., Nagoya, Japan
Abstract :
This paper reports a thermal sensor assembled by two multi-walled carbon nanotubes (MWCNTs) inside a field emission scanning electron microscope (FESEM) which constructed a probe tip in order to detect the local environment of single cell. An atomic force microscope (AFM) cantilever was used for substrate which is composed by Si3N4, and double side was covered by gold layer. Two MWCNTs were assembled to both side of AFM cantilever individually by employing a nanorobotic manipulation. Then another AFM cantilever was used as an end effector to manipulate the MWCNTs to touch, and used electron beam induced deposition (EBID) to bonding the two MWCNTs. The MWCNTs probe thermal sensor was evaluation inside a thermostated container for 30 °C to 60 °C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR). We hope this result will be used rapidly in future.
Keywords :
biological techniques; carbon nanotubes; gold; manipulators; microsensors; nanoelectromechanical devices; probes; scanning electron microscopy; silicon compounds; temperature sensors; C-Si3N4-Au; FESEM; atomic force microscope cantilever; electron beam induced deposition; field emission scanning electron microscope; multiwalled carbon nanotube probe thermal sensor; nanorobotic manipulation; probe tip; temperature 30 C to 60 C; Annealing; Mechatronics; Switches; Temperature sensors;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322046