Title :
A 3-DOF piezohydraulic parallel micromanipulator
Author :
Kallio, Pasi ; Lind, Mikael ; Zhou, Quan ; Koivo, Heikki N.
Author_Institution :
Autom. & Control Inst., Tampere Univ. of Technol., Finland
Abstract :
The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellows results in a new type of parallel structure, where the joints are integrated into actuator links. The joint-free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control is organised in four levels for nonlinearity compensation, position feedback control, supervision and tackling of automatic operations. The micromanipulator presented provides an exceptional combination of submicrometer resolution, large work space, miniature size and advanced control
Keywords :
compensation; computerised control; control nonlinearities; electrohydraulic control equipment; feedback; manipulators; micromechanical devices; piezoelectric actuators; position control; real-time systems; bellows; feedback; hydraulic oil; nonlinearity compensation; parallel micromanipulator; piezoelectric actuators; piezohydraulic actuation systems; position control; real-time systems; Assembly systems; Automatic control; Bellows; Inspection; Manipulators; Mechanical systems; Microelectromechanical systems; Micromanipulators; Micromechanical devices; Space technology;
Conference_Titel :
Robotics and Automation, 1998. Proceedings. 1998 IEEE International Conference on
Conference_Location :
Leuven
Print_ISBN :
0-7803-4300-X
DOI :
10.1109/ROBOT.1998.677432
