Title :
Gas-lubricated micro-bearings for microactuators
Author :
Huang, J.-B. ; Tong, Q.-Y. ; Mao, P.-S.
Author_Institution :
Microelectron. Center, South-East Univ., Nanjing, China
Abstract :
The advantages and scale-down of gas lubricated bearings are discussed. The effect of molecular mean free path on the bearing is considered. An aerodynamic spiral grooved microbearing and an externally pressurized microbearing have been designed and fabricated by processes derived from the IC fabrication process. They have been used in micromotors with a rotor diameter of 60 mu m and a hub diameter of 20 mu m.<>
Keywords :
electric actuators; integrated circuit technology; machine bearings; micromechanical devices; small electric machines; 20 micron; 60 micron; IC fabrication; aerodynamic spiral grooved microbearing; externally pressurized microbearing; gas lubricated bearings; hub diameter; microactuators; micromotors; molecular mean free path; rotor diameter; scale-down; Actuators; Aerodynamics; Contamination; Equations; Friction; Insulators; Lubricants; Manufacturing; Microactuators; Temperature distribution;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149030
