Title :
Direct-write patterning of metals and graphene oxide electrodes by arc erosion for organic device manufacturing
Author :
Garcia-Velez, M. ; Alvarez, A.L. ; Coya, C. ; Alvarado, G. ; Diez-Betriu, X. ; de Andres, A. ; Jimenez-Trillo, J.
Author_Institution :
Dept. Tecnol. Electron. ESCET, Univ. Rey Juan Carlos, Madrid, Spain
Abstract :
Electric arc erosion performed at low continuous voltages has been recently proven as a successful patterning technique for thin films of different conductive materials. In this work, we present an application of this procedure to materials typically aimed for device electrodes, such as indium tin oxide (ITO), gold (Au), graphene oxide (GO) or aluminum doped zinc oxide (AZO), as well as a more in depth study of the electrical discharge generation at submicron scale, which allows optimizing the procedure.
Keywords :
arcs (electric); electrodes; gold; graphene; indium compounds; semiconductor device manufacture; tin compounds; Au; CO; ITO; aluminum doped zinc oxide; conductive materials; device electrodes; direct-write patterning; electric arc erosion; electrical discharge generation; gold; graphene oxide electrodes; indium tin oxide; metals; organic device manufacturing; submicron scale; thin films; Electrodes; Glass; Gold; Graphene; Indium tin oxide; Probes; arc erosion; displa; graphene oxide; organic devices; organic solar cell;
Conference_Titel :
Electron Devices (CDE), 2013 Spanish Conference on
Conference_Location :
Valladolid
Print_ISBN :
978-1-4673-4666-5
Electronic_ISBN :
978-1-4673-4667-2
DOI :
10.1109/CDE.2013.6481330