Title :
Effect of UV light and low temperature on solution-processed, high-performance metal-oxide semiconductors and TFTs
Author :
Majumdar, Himadri ; Leppaniemi, Jaakko ; Ojanpera, Kimmo ; Huttunen, Olli-Heikki ; Alastalo, Ari
Author_Institution :
Printed Functional Solutions, VTT Tech. Res. Centre of Finland, Espoo, Finland
Abstract :
This paper focuses on ultra-violet (UV)-curing of solution-processed metal-oxide (MO) semiconductors for application in thin film transistors (TFTs). The goal is to combine low-temperature thermal annealing with UV exposure and achieve printable transistors on flexible plastic substrates. In this paper we focus on the use of two different wavelengths of UV and clarify their effect on the performance of the metal-oxide semiconductors. The electrical properties of TFTs made with these semiconductors are characterized. The results show that wavelength of the UV exposure is critical for optimized performance of the semiconductor and the TFTs.
Keywords :
annealing; curing; thin film transistors; ultraviolet radiation effects; UV exposure; UV light; electrical properties; flexible plastic substrates; high-performance metal-oxide semiconductors; low temperature effect; low-temperature thermal annealing; printable transistors; solution-processed metal-oxide semiconductors; thin film transistors; ultra-violet curing; Annealing; Films; Metals; Plastics; Substrates; Thin film transistors;
Conference_Titel :
Electronics System-Integration Technology Conference (ESTC), 2014
Conference_Location :
Helsinki
DOI :
10.1109/ESTC.2014.6962762