DocumentCode
160039
Title
Effect of UV light and low temperature on solution-processed, high-performance metal-oxide semiconductors and TFTs
Author
Majumdar, Himadri ; Leppaniemi, Jaakko ; Ojanpera, Kimmo ; Huttunen, Olli-Heikki ; Alastalo, Ari
Author_Institution
Printed Functional Solutions, VTT Tech. Res. Centre of Finland, Espoo, Finland
fYear
2014
fDate
16-18 Sept. 2014
Firstpage
1
Lastpage
3
Abstract
This paper focuses on ultra-violet (UV)-curing of solution-processed metal-oxide (MO) semiconductors for application in thin film transistors (TFTs). The goal is to combine low-temperature thermal annealing with UV exposure and achieve printable transistors on flexible plastic substrates. In this paper we focus on the use of two different wavelengths of UV and clarify their effect on the performance of the metal-oxide semiconductors. The electrical properties of TFTs made with these semiconductors are characterized. The results show that wavelength of the UV exposure is critical for optimized performance of the semiconductor and the TFTs.
Keywords
annealing; curing; thin film transistors; ultraviolet radiation effects; UV exposure; UV light; electrical properties; flexible plastic substrates; high-performance metal-oxide semiconductors; low temperature effect; low-temperature thermal annealing; printable transistors; solution-processed metal-oxide semiconductors; thin film transistors; ultra-violet curing; Annealing; Films; Metals; Plastics; Substrates; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics System-Integration Technology Conference (ESTC), 2014
Conference_Location
Helsinki
Type
conf
DOI
10.1109/ESTC.2014.6962762
Filename
6962762
Link To Document