• DocumentCode
    160039
  • Title

    Effect of UV light and low temperature on solution-processed, high-performance metal-oxide semiconductors and TFTs

  • Author

    Majumdar, Himadri ; Leppaniemi, Jaakko ; Ojanpera, Kimmo ; Huttunen, Olli-Heikki ; Alastalo, Ari

  • Author_Institution
    Printed Functional Solutions, VTT Tech. Res. Centre of Finland, Espoo, Finland
  • fYear
    2014
  • fDate
    16-18 Sept. 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper focuses on ultra-violet (UV)-curing of solution-processed metal-oxide (MO) semiconductors for application in thin film transistors (TFTs). The goal is to combine low-temperature thermal annealing with UV exposure and achieve printable transistors on flexible plastic substrates. In this paper we focus on the use of two different wavelengths of UV and clarify their effect on the performance of the metal-oxide semiconductors. The electrical properties of TFTs made with these semiconductors are characterized. The results show that wavelength of the UV exposure is critical for optimized performance of the semiconductor and the TFTs.
  • Keywords
    annealing; curing; thin film transistors; ultraviolet radiation effects; UV exposure; UV light; electrical properties; flexible plastic substrates; high-performance metal-oxide semiconductors; low temperature effect; low-temperature thermal annealing; printable transistors; solution-processed metal-oxide semiconductors; thin film transistors; ultra-violet curing; Annealing; Films; Metals; Plastics; Substrates; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics System-Integration Technology Conference (ESTC), 2014
  • Conference_Location
    Helsinki
  • Type

    conf

  • DOI
    10.1109/ESTC.2014.6962762
  • Filename
    6962762