Hybrid-type Surface Thermometer at High Temperature

We have developed a hybrid-type surface thermometer which combines the advantages of contact and non-contact methods, offering a way of overcoming the weak points of both methods. The hybrid-type surface thermometer is composed mainly of two components: i) a metal film that makes contact with the object and measure its temperature, and ii) an optical sensor that is used to detect the radiance of the rear surface of the metal film. Temperature measurement using this thermometer is possible within a random error of plusmn0.5 K after compensating systematic errors in the temperature range from 900 to 1000 K. This thermometer provides a useful means for calibration of in-situ temperature measurement in various processes, especially in the semiconductor industry. This paper introduces the basic idea of the hybrid-type surface thermometer, presents experimental results and discussions