Development of low-cost and large-area nanopatterned vitreous carbon stamp for glass nanoreplication

A low-cost and large-area nano-patterning method of vitreous carbon (VC) was proposed for the stamp of glass nanoreplication process. A polymer mold for a VC nano-pattern was replicated by UV imprinting from a silicon master pattern, and a furan precursor with a nano-grating structure with a pitch of 500.5nm and height of 232.4nm was replicated against a polymer mold. By the carbonization of the furan precursor, a VC nanostamp a nanograting cavity with a pitch of 384nm and a height of 151nm was fabricated. Finally, a glass nanograting was fabricated by glass thermal nanoreplication process using the VC mold. To examine the feasibility of the proposed method, the thermal stability of the optical filter composed of glass nanograting and TiO₂ layer was analyzed.