Title :
Pressurized microvalve with SMD-based activation to drive fluid in low-cost and autonomous MEMS
Author :
Flores, Guadalupe ; Perdigones, Francisco Antonio ; Quero, Jose M.
Author_Institution :
Dept. of Electron. Eng., Univ. of Seville, Sevilla, Spain
Abstract :
This paper reports an inexpensive and simple method to impulse fluid in PCB-based Lab on a Chip (LOC) MEMS devices. This method consists on using pressurized SU-8 chambers, with membranes as cover. The membrane is burst thank to the increase of pressure in the chamber due to the increase of temperature, at constant volume. The increase of temperature is achieved supplying voltage to a Surface-Mounted-Device (SMD) resistor. This method is intended for fabricating autonomous and inexpensive LOC devices.
Keywords :
lab-on-a-chip; microvalves; printed circuits; resistors; surface mount technology; PCB-based lab-on-a-chip MEMS devices; SMD resistor; SMD-based activation; autonomous MEMS; impulse fluid; inexpensive LOC devices; low-cost MEMS; pressurized SU-8 chambers; pressurized microvalve; surface-mounted-device resistor; Fabrication; Fluids; Microfluidics; Micromechanical devices; Microvalves; Resistors; Resists; LOC; MEMS; Microfluidics; SU-8;
Conference_Titel :
Electron Devices (CDE), 2013 Spanish Conference on
Conference_Location :
Valladolid
Print_ISBN :
978-1-4673-4666-5
Electronic_ISBN :
978-1-4673-4667-2
DOI :
10.1109/CDE.2013.6481364
