Title :
Self assembled bimetallic Ag/Cu-Si nanowires on Si(001) synthesized with e-beam evaporation
Author :
Ng, Poh-Keong ; Fisher, Brandon ; Low, Ke-Bin ; Bode, Matthias ; Lilley, Carmen M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Chicago, Chicago, IL, USA
Abstract :
This paper presents a method of fabricating self assembled bimetallic Ag and Cu-Si nanowires on Si(001) with electron beam (e-beam) evaporation in ultra high vacuum (UHV) environment. We fabricated three types of bimetallic nanowires with two variations of Ag/Cu-Si that were modulated in longitudinal segment wise and a parallel type of bimetallic nanowire. Two types of fabrication were performed: (1) a two segment nanowire with Ag and Cu-Si in both modulated and parallel directions and (2) a three segment nanowire with the following Ag/Cu-Si/Ag and Cu-Si/Ag/Cu-Si configurations. In situ scanning electron microscopy (SEM) images are shown. X-ray energy dispersive energy spectroscopy (XEDS) was performed on a bimetallic nanowire.
Keywords :
X-ray chemical analysis; copper alloys; electron beam deposition; evaporation; nanowires; scanning electron microscopy; self-assembly; silicon alloys; silver alloys; AgSi; CuSi; X-ray energy dispersive energy spectroscopy; bimetallic nanowire; e-beam evaporation; electron beam evaporation; scanning electron microscopy; self assembly; ultra high vacuum environment; Atomic measurements; Image resolution; Image segmentation; Lead; Length measurement; Milling; Silicon; Ag/Cu-Si nanowires; E-beam evaporation; SEM; Self assembly; XEDS;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322114
