Title :
Combined nanopatterning and characterization of silicon surface using scanning tunelling microscopy with conductive diamond tip
Author :
Lysenko, Oleg G. ; Dub, Sergey N. ; Grushko, Vladimir I. ; Mitskevych, Eugene I. ; Mamalis, Athanasios G.
Author_Institution :
V.Bakul Inst. for Superhard Mater., Kiev, Ukraine
Abstract :
Results of combined experiments on silicon samples that include nanoscratching, visualization and tunelling spectroscopy of the surface using the modified scanning tunelling microscopy with Berkovich conductive diamond tip are presented. The effect of the scratching parameters on the groove size was investigated. Characteristics of obtaining electrically conductive paths on the silicon surface due to the phenomenon of phase transitions are shown.
Keywords :
nanopatterning; scanning tunnelling microscopy; semiconductor technology; surface treatment; Berkovich conductive diamond tip; Si; electrically conductive paths; groove size; modified STM; nanoscratching; scanning tunelling microscopy; silicon surface characterization; silicon surface nanopatterning; surface tunelling spectroscopy; Crystals; Facsimile; Loading;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322123
