Title :
Benzene detection on nanostructured tungsten oxide MEMS based gas sensors
Author :
Vallejos, S. ; Stoycheva, T. ; Llobet, E. ; Correig, X. ; Umek, P. ; Gràcia, I. ; Blackman, C.
Author_Institution :
Inst. de Microelectron. de Barcelona (IMB-CNM), Barcelona, Spain
Abstract :
Gas sensor devices based on tungsten oxide films, grown directly on MEMS based substrates at 400°C via AACVD, are tested towards low concentrations of benzene. Analysis of the films show they are composed of randomly orientated nanoneedles with strong preferential orientation. These films are sensitive to benzene even at low (1 ppm) concentration and at moderate sensor operating temperatures (between 150 and 250°C). Sensitivity of films is attributed to the particular morphology and structure of the film and the formation of higher fraction of oxygen vacancies at the surface of the nanoneedles, compared to polycrystalline films.
Keywords :
gas sensors; microsensors; nanostructured materials; sensitivity; tungsten compounds; AACVD; benzene detection; nanostructured tungsten oxide MEMS based gas sensors; particular morphology; polycrystalline films; randomly orientated nanoneedles; strong preferential orientation; temperature 150 degC to 250 degC; temperature 400 degC; Heating; X-ray scattering;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322164
