• DocumentCode
    1605047
  • Title

    Science and technology of piezoelectric/diamond heterostructures for monolithically integrated high performance MEMS/NEMS/CMOS devices

  • Author

    Auciello, O. ; Sumant, A.V. ; Hiller, J. ; Kabius, B. ; Ma, Z. ; Srinivasan, S.

  • Volume
    2
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper describes the fundamental and applied science performed to integrate piezoelectric PbZrxTi1??xO3 and AlN films with a novel mechanically robust ultrananocrystalline diamond layer to enable a new generation of low voltage / high-performance piezoactuated hybrid piezoelectric/diamond MEMS/NEMS devices.
  • Keywords
    Adhesives; CMOS technology; Laboratories; Materials science and technology; Micromechanical devices; Nanoelectromechanical systems; Piezoelectric devices; Piezoelectric films; Piezoelectric polarization; Young´s modulus;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693745
  • Filename
    4693745
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1605047