DocumentCode
1605159
Title
Broadband permittivity measurements of thin-film ferroelectrics to 40 GHz
Author
Orloff, Nathan D. ; Booth, James C. ; Murakami, Makoto ; Takeuchi, Ichiro
Author_Institution
National Institute of Standards and Technology, Boulder, CO 80302, USA
Volume
2
fYear
2008
Firstpage
1
Lastpage
2
Abstract
We demonstrate a novel experimental technique to measure the complex permittivity of dielectric thin films over the frequency range from 100 Hz to 40 GHz. We apply this technique to determine the broadband permittivity for ferroelectric thin films such as PbTiO3 at room temperature. We discuss the value of such frequency-dependent measurements for determining the dielectric response of ferroelectric thin films at finite frequencies.
Keywords
Capacitance measurement; Coplanar waveguides; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Frequency measurement; Permittivity measurement; Substrates; Transistors; Transmission line measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location
Santa Re, NM, USA
ISSN
1099-4734
Print_ISBN
978-1-4244-2744-4
Electronic_ISBN
1099-4734
Type
conf
DOI
10.1109/ISAF.2008.4693752
Filename
4693752
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