• DocumentCode
    1605159
  • Title

    Broadband permittivity measurements of thin-film ferroelectrics to 40 GHz

  • Author

    Orloff, Nathan D. ; Booth, James C. ; Murakami, Makoto ; Takeuchi, Ichiro

  • Author_Institution
    National Institute of Standards and Technology, Boulder, CO 80302, USA
  • Volume
    2
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate a novel experimental technique to measure the complex permittivity of dielectric thin films over the frequency range from 100 Hz to 40 GHz. We apply this technique to determine the broadband permittivity for ferroelectric thin films such as PbTiO3 at room temperature. We discuss the value of such frequency-dependent measurements for determining the dielectric response of ferroelectric thin films at finite frequencies.
  • Keywords
    Capacitance measurement; Coplanar waveguides; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Frequency measurement; Permittivity measurement; Substrates; Transistors; Transmission line measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693752
  • Filename
    4693752